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Wafer Fabrication by Linda F. Atherton, Robert W. Atherton (1995, Hardcover) 
Wafer Fabrication by Linda F. Atherton, Robert W. Atherton (1995, Hardcover)
Publisher: Kluwer Academic Pub
Publication Date: 1995-11-01
Series: The Kluwer International Series in Engineering and Computer Science
Language: English
Format: Hardcover
ISBN-10: 0792396197
ISBN-13: 9780792396192
Product ID: EPID744070
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Details
Publication Date:1995-11-01
Series:The Kluwer International Series in Engineering and Computer Science

Size
Length:468 pages
Height:9.8 in
Width:6.8 in
Thickness:1.2 in
Weight:30.4 oz

Industry Reviews
Atherton and Atherton (principals, In-Motion Technology) provide a comprehensive treatment of both the technology of wafer fabrication and microprocessor chip factories, emphasizing methods to analyze and predict the performance of these factories. They introduce wafer fabrication, and manufacturing; factory dynamics such as bottlenecks and cycle time; processes for wafer fabrication; performance basics and advanced concepts; factory modeling; cluster tools; and performance economics. The volume is written for engineers, and originated as a series of short courses for professionals in the electronics industry. Annotation c. by Book News, Inc., Portland, Or.
SciTech Book News (06/01/1996)

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