| Details | | Publication Date: | 1989-07-01 | | Series: | ASTM SPECIAL TECHNICAL PUBLICATION// STP | | Editor: | Dinesh C. Gupta |
| Size | | Height: | 9.5 in | | Width: | 6.8 in | | Thickness: | 1.0 in | | Weight: | 24.0 oz |
Industry Reviews For the semiconductor industry. Papers cover silicon crystal growth and epitaxial deposition techniques, fabrication technology, microcontamination, metallization and interconnects, material defects and Gettering control charts, standards, and specifications. Annotation copyright Book News, Inc. Portland, Or. SciTech Book News
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