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The Physics of Moire Metrology by Ilana Glatt, Oded Kafri (1990, Hardcover) 
The Physics of Moire Metrology by Ilana Glatt, Oded Kafri (1990, Hardcover)

 
The Physics of Moire Metrology by Ilana Glatt, Oded Kafri (1990, Hardcover)

Publisher: Wiley-Interscience
Publication Date: 1990-02-01
Series: Wiley Series in Pure and Applied Optics
Language: English
Format: Hardcover
ISBN-10: 0471509671
ISBN-13: 9780471509677
Product ID: EPID257358
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Details
Publication Date:1990-02-01
Series:Wiley Series in Pure and Applied Optics

Publisher's Note
This one volume treatise presents a comprehensive discussion of moire metrology analysis. The authors work from a new point of view, treating the gratings used in moire analysis as an artificial analog to electromagnetic waves, thereby comparing moire analysis with conventional optical methods based on wave properties such as interferometry. It is shown that for every interferometric technique in metrology, there is an analogous technique in moire metrology and vice versa, and that scientists involved in optical metrology have a real choice between interferometric and moire methods.

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