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The Physics of Micro/Nano-Fabrication by Ivor Brodie, Julius J. Muray (1993, Hardcover) 
The Physics of Micro/Nano-Fabrication by Ivor Brodie, Julius J. Muray (1993, Hardcover)
Publisher: Plenum Pub Corp
Publication Date: 1993-02-01
Series: Microdevices
Language: English
Format: Hardcover
ISBN-10: 0306441462
ISBN-13: 9780306441462
Product ID: EPID98286
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Details
Publication Date:1993-02-01
Series:Microdevices

Size
Height:10.3 in
Width:6.8 in
Thickness:1.5 in
Weight:48.0 oz

Industry Reviews
Updated and rewritten from The Physics of Microfabrication , published ten years ago. Chapters include a preliminary survey; sources, optics, interactions, physics and chemistry of particle beams; layering technologies; pattern generation; microcharacterization; and limits to nanofabrication. Revolutionary developments in methods for making and viewing ultrasmall devices made in the last decade are discussed. Annotation copyright Book News, Inc. Portland, Or.
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