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Novel Silicon Based Technologies by NATO Advanced Study Institute on Novel Silicon Based Technologies (198, North Atlantic Treaty Organization Scientific Affairs Division, Roland A. Levy (1991, Hardcover) 
Novel Silicon Based Technologies by NATO Advanced Study Institute on Novel Silicon Based Technologies (198, North Atlantic Treaty Organization Scientific Affairs Division, Roland A. Levy (1991, Hardcover)
Publisher: Kluwer Academic Print on Demand
Publication Date: 1991-04-01
Series: NATO Asi Series. Series E, Applied Sciences, No. 193.
Language: English
Format: Hardcover
ISBN-10: 0792311124
ISBN-13: 9780792311126
Product ID: EPID704044
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Details
Publication Date:1991-04-01
Series:NATO Asi Series. Series E, Applied Sciences, No. 193.
Editor:Roland A. Levy

Size
Length:277 pages

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Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for sensors, integrated photonic circuits on silicon, and principles and implementation of artificial neural networks. The selected mixture of papers is meant to shed light on the science as well as the engineering aspects of emerging silicon based technologies. A video program (unseen) provides audiovisual documentation of the book's contents. Annotation copyright Book News, Inc. Portland, Or.
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